Growth of magnetron sputtered coatings (in Czech) SEDLACEK, V. vol. 33 (1995), no. 1, pp. 22 - 30
Abstract The regularity of growth of the TiN coating on Cr steel was evaluated by measured values of maximum heights of the surface profile on various places. To complete the information, the number and radius of the peaks were also used. Graphic records of the surface measurements gave the necessary details about the shape of the peaks and the typical shapes were drawn. Their verification was made by means of cuts perpendicular to the surface. The condition of the peak formation and the main parameters, which are decisive for the regularity of growth and the surface roughness are discussed. It seems, that one of the main reasons for the peak formation is the irregular material transport to the surface coating. Key words TiN coating, Cr steel, surface measurements Full text not available
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